Abstract:A self-driving linear ultrasonic motor with double vibrators was developed. The stator consists of two vibrators and a mass. The mass is in the middle of the stator. Each vibrator is symmetrically connected with one side of the mass by a slender shaft. The bending vibrations of two vibrators inspire a wobbling motion of the mass. Therefore, the locus of particles on the driving head is an ellipse. The friction force between the mass and the leader drives the motor moving itself. The measured local bending resonant frequency of the mass is about 20 792 Hz, and that of the stator is about 40 420 Hz. Emulation results showed that when the local bending resonant mode of the mass is used as working mode, the vibration amplitude of the mass is large. Experimental results showed that the driving speed of the motor is high and the motor can work stably with little temperature rise when the mass working in the local bending resonant mode. But when the bending resonant mode of the stator is used as working mode, the temperature rise of the stator is high, therefore the motor cannot work stably. The characteristics of the prototype motor were measured experimentally. The maximum speed of the motor is about 598 mm/s, and the maximum driving force is over 1.94 N, when the phase difference of the applied two signals is 90° and the peak to peak driving voltage is 138 V at the frequency of 20.8 kHz.

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