Microheater Array Fabrication by Laser Micro-Cladding Method

WANG Shao-fei,CAO Yu,WANG Xiao-bao,LI Xiang-you,ZENG Xiao-yan
DOI: https://doi.org/10.3321/j.issn:0258-7025.2007.11.022
2007-01-01
Chinese Journal of Lasers
Abstract:The 2×2 and 1×4 microheater arrays have been fabricated by laser micro-cladding.The effect of laser power and scanning speed on the line width have been studied.The results demonstrate that the line width increases with the increase of laser power,and decreases with the increase of laser scanning speed.The performances of the 2×2 microheater array were tested.The effect of heating time,voltage and position on the temperature were studied.The results demonstrate that the temperature of the microheater increases with the increase of heating time and becomes unchangeable in the end.The temperature of the microheater increases with the increase of voltage.The temperature the heated area decreases with the increase of the distance to the microheater.And the calefactive speed was calculated when the voltage was stable,and it is up to 0.45 ℃/s.Lastly,some examples for microheaters array were demonstrated.
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