Analysis and Performance of a Smart,High-Voltage SENSFET

Li Zehong,Wang Xiaosong,Wang Yiming,Yi Kun,Zhang Bo,Li Zhaoji
DOI: https://doi.org/10.3969/j.issn.1674-4926.2007.12.021
2007-01-01
Chinese Journal of Semiconductors
Abstract:Based on the JFET theory,a smart,high-voltage SENSFET that adopts double RESURF is designed.The implant dose,the start point,the length of the lower electric field layer Pwell2,and the implant dose of Nwell are optimized,and thus we obtain a SENSFET with a breakdown voltage of 730V and a linear resistance of 7.2e5Ω·μm.The experimental results show that the breakdown voltage is 700V and the linear resistance is 10kΩ when the width of the SENSFET is 75μm.The experimental results agree with the numerical results.The SENSFET is used as the detector and self-supply of a smart power integrated circuit.
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