Abstract:Parasitic piezo dive is a primary method for cross-scale positioning, which can adjust the locking force appropriately to increase the service life but bring radial fluctuations, backward motion, and bi-directional inconsistency issues. In this work, a multi-mode self-centering piezo actuator is proposed, a theoretical analysis model of the transmission mechanism is established, and parameterized design is conducted using the finite element method. The actuator features normal pressure adjustment, parallel drive, parasitic drive, and rectangular drive modes. Under the first mode, a bias voltage of 50 Vp-p achieved a locking force adjustment of 2.5 N. Furthermore, the characteristics of the remaining modes were compared. It was observed that the parallel trajectory drive mode exhibited a higher velocity of 31.68 mm/s, while the rectangular trajectory drive mode suppressed the backward motion to achieve smooth driving, with a linear correlation coefficient R-2 of the displacement reaching 0.9999. Compared to the traditional parasitic actuator, the radial fluctuations in these two drive modes were reduced by up to 98.4 %, and the bidirectional consistency were improved to 97 %. Finally, we completed convenient imaging of various specimens across the full-stroke of microscopes by integrated circuit design and Bluetooth communication on mobile phones.

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