A New Open-Loop Driving Method of Piezoelectric Actuator for Periodic Reference Inputs

Changhai Ru,Lining Sun
DOI: https://doi.org/10.1016/j.ultras.2006.05.198
IF: 4.2
2006-01-01
Ultrasonics
Abstract:The hysteresis characteristic of piezoelectric actuators is one of the major deficiencies in a wide variety of precise tracking positioning controls. In this paper, a novel mathematical model is proposed to describe hysteresis precisely and an open-loop tracking controller is implemented with the proposed model to compensate the hysteresis for tracking periodic sinusoidal inputs. Finally, some tracking control experiments based on a micro-positioning stage for the desired sinusoidal trajectory are performed according to the proposed method and the experimental results demonstrate that the positioning precision is noticeably improved in the open-loop operation compared to the conventional open-loop control without any compensation. In comparison to the regular PID closed-loop controller, the proposed feedforward control method has better tracking performance.
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