Abstract:Piezoelectric actuators (PEAs) are widely used in many nano-resolution manipulations. A PEA’s hysteresis becomes the main factor limiting its motion accuracy. The distinctive feature of a PEA’s hysteresis is the interdependence between the width of the hysteresis loop and the frequency or rate of the control voltage. Generally, the control voltage is first amplified using a voltage amplifier (VA) and then exerted on the PEA. In this VA-PEA module, the linear dynamics of the VA and the nonlinearities of the PEA are coupled. In this paper, it is found that the phase lag of the VA also contributes to the rate dependence of the VA-PEA module. If only the PEA’s hysteresis is considered, it will be difficult to achieve high-frequency modeling and control. Consequently, great difficulties arise in high-frequency hysteresis compensation and trajectory tracking, e.g., in the fast scanning of atomic force microscopes. In this paper, the VA-PEA module is modeled to be the series connection of a linear subsystem and a nonlinear subsystem. Subsequently, a feedforward phase–dynamics compensator is proposed to compensate for both the PEA’s hysteresis and the phase lag of the VA. Further, an unscented Kalman-filter-based proportional–integral–derivative controller is adopted as the feedback controller. Under this feedforward–feedback combined control scheme, high-bandwidth hysteresis compensation and trajectory tracking are achieved. The trajectory tracking results show that the closed-loop trajectory tracking bandwidth has been increased to the range of 0–1500 Hz, exhibiting excellent performance for fast scanning applications.

Adaptive Robust Repetitive Control of Piezoelectric Actuators

Adaptive Robust Precision Motion Control of a Piezoelectric Positioning Stage

Prandtl-Ishlinskii Model-Based Adaptive Feedforward Control for Piezoelectric-Stack-actuator-driven Systems

Tracking of Piezoelectric Actuators with Hysteresis: A Nonlinear Robust Output Regulation Approach

Asymptotic Tracking Control Of Piezoelectric Actuators With Hysteresis

Robust adaptive control of piezo-actuated positioning stages with an ellipse-based hysteresis model

Hysteresis Compensation of a Piezoelectric-Stack-actuator-driven (Psa-Driven) System Using Inversion-Based Models and Feedback Control

High-Bandwidth Repetitive Trajectory Tracking Control of Piezoelectric Actuators Via Phase–Hysteresis Hybrid Compensation and Feedforward–Feedback Combined Control

Dynamic Hysteresis Modeling And Control Of Piezoelectric Actuator Based On H-Infinity Robust Disturbance Observer

Charge Controller with a Novel Hysteresis Disturbance Observer for High-Accuracy Trajectory Tracking of Piezoelectric Actuators

Tracking Control of Piezoceramic Actuators by Using Preisach Model

Finite-time adaptive sliding mode control for high-precision tracking of piezo-actuated stages

Trajectory Compensation Based Adaptive Control (TCAC) for High-Precision Piezoelectric Actuators

Tracking Control Of Piezoelectric Actuators By Feedforward Hysteresis Compensation

Robust Adaptive Backstepping Control for Piezoelectric Nano-Manipulating Systems

Time-Frequency Analysis-Based Real-Time Iterative Compensation for Piezoelectric Nanopositioning Stage

Trajectory Tracking of Piezoelectric-Driven Stage Via a Hybrid Controller for Both Periodic and Non-Periodic Motion

High-Speed Tracking Control of Piezoelectric Actuators Using an Ellipse-Based Hysteresis Model

Current-Cycle Iterative Learning Control for High-Precision Position Tracking of Piezoelectric Actuator System Via Active Disturbance Rejection Control for Hysteresis Compensation

Adaptive Output Feedback Control with Feedback-Feedfoward Compensator for Piezoactuator-Driven Stages

Control system design for piezoelectric actuator based on hysteresis compensation