Abstract:Smart materials, such as piezoelectric actuator, magnetostrictive actuator and memory alloy, play an important role of micro-positioning systems. Piezoelectric actuator is widely used in micro-positioning system, and exhibits the merits of high precision, large driving force and rapid response. However, the inherent hysteresis nonlinearity, often leads to tracking error and oscillations, which prevent its industry application. Piezoelectric actuator can be driven by direct current voltage. The existing control schemes can be divided into two categories: model-based and model-free. The first one compensates the nonlinearity by an inversed hysteresis model, which plays the role of a feed forward compensator. This method is dependent on the exact hysteresis model, and very sensitive to model error and uncertainty. Therefore, the model-free method has been paid great attentions for better performance. Xu proposed a slide mode control strategy for piezoelectric actuator without hysteresis model required. Zhang introduces disturbance observer (DOB) control for piezoelectric actuators using robust design. Combined with mode-based feed forward compensation and feedback control, an asymmetric hysteresis model is used for the composite control. Extended state observer (ESO) is originated from active disturbance rejection control (ADRC). The key idea of ESO is to regard model uncertain and external disturbance as an equivalent disturbance and make the real-time observation and compensation. Unlike the traditional disturbance observer, ESO exhibits strong ability in disturbance rejection by an extended state. It has been paid more and more attention in control theory and engineering. Recently, a new model reference control scheme has been proposed in some literatures. Different from the existing adaptive reference control, disturbance rejection technology was employed for the model reference compensation. The goal of the paper is to apply this method to a real piezoelectric actuator. The remainder of this paper is organized as follows. Section 2 introduce the mechanism of piezoelectric actuator. Section 3 presents the transformation of equivalent feedback model (EFM) and the proposed control scheme. Section 4 shows the experiment results to verify the effectiveness of the control method. Section 5 draws the conclusions.

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