Profile Measurement for Micro-Varying Liquid Surface Based on Chessboard Grating Ronchi Test

ZHANG Ming-zhao,WANG Bo-xiong,LUO Xiu-zhi,LIU Guo-zhong,HU Bai-qing
DOI: https://doi.org/10.3321/j.issn:1004-924x.2007.06.002
2007-01-01
Optics and Precision Engineering
Abstract:Based on chessboard grating Ronchi test,a micro-varying surface profile measurement method was proposed,which can measure the slopes in two orthogonal directions of the surface simultaneously for reconstructing the surface profile by only one deformed chessboard grating pattern.Information of the two orthogonal directions in deformed chessboard grating patterns can be effectively separated and extracted through simple differential operation and extremum tracking.Based on the proposed method and the data extraction algorithm,a micro-varying surface profile measurement system was built up to measure a stationary surface and a varying surface.The results show that the system meets the measurement need of micro-varying liquid surface in some research fields with its resolution less than 0.1 μm and measurement range more than 50 μm.
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