Abstract:Fiber-reinforced ceramic matrix composites (FRCMCs) have potential applications in aerospace and other high-tech fields. Meanwhile, it is significant to evaluate the grinding surface quality of FRCMCs. But according to FRCMCs’ anisotropic and non-homogeneous structure, it is difficult to evaluatethe surface quality with the traditionalmeasuring method used in metal material. The present paper studied the 3D micro-topographical measurement and evaluationfrom a new perspective. The research is based on some new discovery that the material enhanced fiber orientation played key role in micro-topographical of FRCMC grinding surface. Using a non-contact optical measurement instrument, the method was developed on 2.5D SiO2/SiO2 composite. Through a series of measuring experiments, we found that both starting position of measurement and sampling conditions affected on the measurement results. This paper recommendedoptimization measurement parameter valuesof sampling conditions, and also analyzedcharacteristics of the RCMC grinding surface topography on amplitude, wave distribution and surface supportcharacteristics in details. The results show that the optimal range of sampling interval is 40 μm to 70 μm, the range of sampling area is better more than 64mm2 and the range of sampling speed is 8 to 14mm/s. The measurement of surface topography is the bridge framed between the manufacture and parts performance, so theresearchobtained will be an important technical support on improvingthe processing quality of FRCMC.

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