Mechanical Properties of 3D Silicon Nanosprings Fabricated by FIB

LAI Xi-hu,XU Jun,WU Wen-gang,JING Guang-yin,HAO Yi-long
DOI: https://doi.org/10.3969/j.issn.1672-6030.2007.04.029
2007-01-01
Nanotechnology and Precision Engineering
Abstract:This paper presented 3D silicon nanosprings fabricated by focused-ion-beam(FIB) milling on nanometer-thick single crystal silicon cantilevers,which brought a distribution of nanoscale localized stress into the silicon films and caused their deformation.By intentionally controlling FIB milling on nanometer-thick silicon films,a series of 3D nanosprings with diameters ranging from 540 nm to 840 nm and pitch distances ranging from 1 780 nm to 2 160 nm were achieved.With AFM,the mechanical properties of the fabricated silicon nanospring structures were investigated.The measured transverse buckling stiffness of the nanospring was about 40.74 N/m before anneal and 16.45 N/m after anneal,respectively,while that of silicon nanospring structures was stable because there was no obvious change in their dimensions before and after anneal with ESEM.
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