Modulation Period and Nano TaN/VN Multilayers

Xuehua Zhang,Meng Cao,Jin Yang,Tong Liu,Mingxia Wang,Xiangyun Deng,Dejun Li
DOI: https://doi.org/10.3969/j.issn.1672-7126.2007.05.002
2007-01-01
Abstract:TaN/VN multilayers with a nanoscale modulation period were grown by RF magnetron sputtering. Its microstructures and mechanical properties were characterized with X-ray diffraction (XRD), a nano-indenter and a profiler. The results show that the multilayers have higher nanohardness than that of TaN, VN coatings, and their mixtures. The nanohardness of the multilayer, 31 GPa, optimizes at a modulation period of 30 mn. Moreover, its elastic modulus and tribological property are also better than that of the multilayers with different modulation periods.
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