Abstract:Silicon has been irreplaceable for a long time due to its well-estiblished design and fabrication in the field of Micro-Electro-Mechanical System (MEMS). However, it has poor tribological properties, which limits the further application of actuators (with relative motion) based MEMS. First, the amorphous silicon (a-Si) coatings were prepared on silicon substrates and high-speed steel (HSS) substrates by plasma enhanced chemical vapor deposition, and the relationships between mechanical properties and tribological performance were also systematically discussed. The wear rate of a-Si film on HSS has decreased significantly (decreased by 81.55%) compared with a-Si coating on silicon, which can be attributed to the larger elastic modulus and hardness of a-Si on the HSS matrix. Then, tungsten disulfide (WS2) nanoflake coatings with low interlayer shear stress were successfully prepared on the amorphous silicon (a-Si) coatings by the drop-casting method, forming a WS2 + a-Si coating to enhance the tribological properties. Combined with first-principles simulations and the characterization of the wear scar morphology, the macro-scale sliding friction of this composite coating against the Al2O3 ceramic ball was investigated in ambient air. The results indicated that the introduction of WS2 nanoflakes reduces the coefficient of friction (CoF) from 0.5 to 0.08. The reduction in CoF could be attributed to the in-situ formation of WS2 lubricating transfer film on the wear scar of the ball and the WS2 heterogeneous interface on a-Si film, leading to asymmetric contact between the friction pairs, which in turn triggers low and stable friction.

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Characterization and Tribological Investigation of Self-Assembled Lanthanum-Based Thin Films on Glass Substrates

Characterization and Tribological Behavior of Octadecene, Dodecene and Undecenoic Acid Films on Si Substrate

Investigation of Tribological Behavior of Lanthanum-Based Thin Films Deposited on Sulfonated Self-Assembled Monolayer

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Formation and Friction Properties Investigation of Rare Earth Modified CNTs Film on Surface of Titanium Alloy Substrates

Preparation and Tribological Behaviors of an Amide-Containing Stratified Self-Assembled Monolayers on Silicon Surface

A Comparative Study on the Anti-Friction Performance of Amorphous Silicon Films Enhanced by WS2 Nanoflakes

Study on Friction and Wear Properties of Rare Earth Reinforced Resin-based Friction Materials

Frictional and Wear Behavior of Micro-Crystalline and Nano-Crystalline Diamond Films

Investigation on microtribological behavior of thin films using friction force microscopy

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The Research of Anti-Adhesive Film by RIE Deposition in MEMS/NEMS

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Preparation and Characterization of Semi-Metal Friction Materials Doping Rare Earths

Molecular Dynamics Study Of Nano-Tribological Properties Of Silicon Nitride Films