Abstract:Silane coupling reagent (3-aminopropyltriethoxysilane (APTES)) was prepared on single-crystal silicon substrates to form two-dimensional self-assembled monolayer (SAM). The terminal-NH2 groups in the film were in situ phosphorylated to -PO(OH)(2) group to endow the film with good chemisorption ability. Then La-based thin films were deposited on phosphorylated APTES-SAM in order to make good use of the chemisorption ability of -PO(OH)(2) groups. The thickness of the film was determined with ellipsometer, while phase transformation and surface morphology, surface energy, phase composition were analyzed by means of atomic force microscope (AFM), contact angle measurements and X-ray photoelectron spectroscopy (XPS). The results indicated that the terminal -NH2 groups could be completely transformed into desirable -PO(OH)(2) groups after phosphorylation of APTES-SAM. Detailed XPS analysis of the La3+ peaks revealed that lanthanum element existed in the films in different states. As a result, conclusion could be made that lanthanum reacted with -PO(OH)(2) groups on the surface of the substrate by chemical bond which would improve the bonding strength between the film and silicon substrate. Since the La-based thin films were well adhered to the silicon substrate, it might find promising application in the surface-modification of single-crystal Si and SiC in microelectromechanical systems (MEMS).

Nano-tribological Characteristics of Lanthanum-Based Thin Films on Sulfonated Self-Assembled Monolayer of 3-Mercaptopropyl Trimethoxysilane

Investigation of Tribological Behavior of Lanthanum-Based Thin Films Deposited on Sulfonated Self-Assembled Monolayer

Friction and Wear Studies of Octadecyltrichlorosilane SAM on Silicon

Characterization and Tribological Behavior of Octadecene, Dodecene and Undecenoic Acid Films on Si Substrate

The Preparation and Friction Behavior of Rare-Earth Composite Film on Silicon

Preparation and Tribological Behaviors of an Amide-Containing Stratified Self-Assembled Monolayers on Silicon Surface

Characterization and Tribological Investigation of Self-Assembled Lanthanum-Based Thin Films on Glass Substrates

Investigation of the Tribological Behavior of 3-Mercaptopropyl Trimethoxysilane Deposited on Silicon

Preparation and Tribological Investigation of Rare Earth Nanofilm on Single-Crystal Silicon Substrate

Friction and Wear Behavior of Organic Silane/Rare Earth Self-assemblied Composite Film on Silicon

Characterization and Tribological Investigation of Self-Assembled Mpts-Mptes/Re Composite Films

Preparation And Micro-Tribological Property Of Hydrophilic Self-Assembled Monolayer On Single Crystal Silicon Surface

The Effects of the Self-Assembly Time on the Preparation of Lanthanum-Based Thin Films on Sulfonated 3-Mercaptopropyl Trimethoxysilane

Novel Self-Assembled Films of La-based Phosphonate 3-Aminopropyltriethoxysilane

Interfacial Properties and Tribological Behavior of 3-Mercaptopropyltrimethoxysilane Self-Assemble Film

Evaluation of nano-frictional and mechanical properties of a novel Langmuir-Blodgett monolayer/self-assembly monolayer composite structure

Tribological Behaviors of Self-Assembled 3-Aminopropyltriethoxysilane Films on Silicon

The Preparation and Friction Behavior of Rare Earth Nanofilm

The Tribological Behavior of 3-Mercaptopropyltrimethoxysilane Self-assembled Film

Fabrication and tribological properties of self-assembled monolayer of n-alkyltrimethoxysilane on silicon: Effect of SAM alkyl chain length

Nanotribological Properties of Silicon with Silane Derived Surface Modification