The Rapid Recurrent Nanocrystalline of the Co Base Soft Magnetic Thin Films

Yu-Lan JING,Xiang-dong JIANG,Huai-wu ZHANG,Yu SHI
DOI: https://doi.org/10.3969/j.issn.1004-2474.2006.02.019
2006-01-01
Abstract:The rapid recurrent thermal annealing (RRTA) method has been used to crystallize the amorphous CoNbZr soft magnetic thin films, which were fabricated by DC magnetron sputtering. The structure and soft magnetic properties were investigated using RRTA method with variation parameters. As a result, crystalline grains with diameter of about 30 nm were formed. The experiment results revealed that the RRTA is an effective method to control the magnetic and electrical properties of CoNbZr thin films.
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