Research on Vibration of Atomic Force Microscope Piezoelectric Microcantilever Affecting Measuring Image

XIAO Zeng-wen,ZHAO Xue-zeng
DOI: https://doi.org/10.3969/j.issn.1004-2474.2006.01.032
2006-01-01
Abstract:Working at tapping mode,atomic force microscope(AFM) piezoelectric microcantilever vibrates with large amplitude.Taking example for nanotube tip,a mathematical model of piezoelectric microcantilever vibration is established and the vibration track of the nanotube tip top is described.From the relation between the nanotube tip top vibration track and the simulation figure,the relative parameters of affecting measurement precision and the method of minishing vibration-induced dilation distortions are found.According to dilation theory of mathematical morphology,the imaging procedure is simulated.The linewidth measurement tests verify the above results.
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