Microfabrication Technologies for Microreactors

YAO Hua-tang,YU Xin-hai,WANG Zheng-dong,TU Shan-dong
2006-01-01
Abstract:Innovation and optimization of fabrication technology for microreactors are discussed,and the basic structures and materials in common used for the microreactors are introduced.Three kinds of primary machining technologies are summarized, which include silicon bulk micromachining,ultra-precise machining and LIGA technology,and four types of prevailing connection methods,such as bonding,high energy beam welding,diffusion welding and adhesive joining are also discussed.Selection of materials,machining technologies and connection methods are demonstrated by introducing the fabrication of some typical microreactors,especially a micro-channel reactor for the production of hydrogen concerning steam reforming of methanol.The performance of the micro-channel reactor,which is made of Fe-Cr-Al stainless steel lamination by MEDM,wet etching and diffusion bonding,has been investigated in a continuous reaction for 100 h.The results show that it can generate enough hydrogen for power output of 10 W.Major problems of the microreactor's fabrication are also pointed out.
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