Studies on coating technology of inner wall of stainless steel pipe with TiN film and its vacuum characteristics

Yaofeng ZHANG,Yong WANG,Wei WEI,Jianping WANG,Le FAN,Daoman JIANG
DOI: https://doi.org/10.3321/j.issn:0253-3219.2006.03.001
2006-01-01
Abstract:The coating technology of inner wall of stainless steel pipe with TiN film by DC sputtering is presented in detail in this paper. The corresponding parameters of the coating process are described and the vacuum characteristics of the coated pipe are determined. Very low outgassing rate shows that DC sputtering can be used to coat stainless steel pipe with TiN film rapidly and effectively, and that the coating technique is a new and effective way for surface treatments of vacuum chambers of some accelerators.
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