Microstructure, mechanical properties, and corrosion resistance of TiSiN coating prepared by FCVA technique with different N 2 flow rates

Jiao Yang,Hongshuai Cao,Yuanhang Li,Fujia Liu,Yibo Tang,Nie Zhao,Fugang Qi,Xiaoping Ouyang
DOI: https://doi.org/10.1016/j.vacuum.2023.111811
IF: 4
2023-01-05
Vacuum
Abstract:TiSiN coatings have attracted extensive attention due to excellent performance in cutting tools, Marine engineering equipment and ship critical components. However, due to the many microparticles and micropores on the coating surface prepared by traditional PVD techniques, the performance of the coatings, especislly corrosion resistance, is seriously affected. Therefore, the preparation of high quality TiSiN coatings is very important for the industrial applications. In this study, high-quality TiSiN coatings were prepared by FCVA technique. The effect of N 2 flow rate on microstructure, mechanical properties and corrosion resistance of TiSiN coating was investigated. The results showed that all TiSiN coatings presented smooth and compact microstructure without cracks. Meanwhile, TiSiN coatings had a nanocomposite structure of amorphous Si 3 N 4 encapsulated TiN crystallites and possessed a preferred orientation of TiN (200) plane. With the increase of N 2 flow rate, the grain size and hardness increased first and then decreased. When N 2 flow rate is 20 sccm, the hardness of TiSiN coating reached the maximum owing to the fine grain strengthening effect. Moreover, TiSiN coating deposited N 2 flow rate of 40 sccm had the best corrosion resistance, with the highest charge transfer resistance and pore resistance, which was primarily related to the best surface quality.
materials science, multidisciplinary,physics, applied
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