Microstructure, Mechanical Properties, and Oxidation Resistance of Nanocomposite Ti–Si–N Coatings

C. H. Zhang,X. C. Lu,H. Wang,J. B. Luo,Y. G. Shen,K. Y. Li
DOI: https://doi.org/10.1016/j.apsusc.2005.04.056
IF: 6.7
2005-01-01
Applied Surface Science
Abstract:Ti–Si–N coatings with different silicon contents (0–12at.%) were deposited onto Si(100) wafer, AISI M42 high speed steel, and stainless steel plate, respectively. These coatings were characterized and analyzed by using a variety of analytical techniques, such as XRD, AES, SEM, XPS, nanoindentation measurements, Rockwell C-type indentation tester, and scratch tester. The results revealed that the hardness was strongly correlated to the amount of silicon addition into a growing TiN film. The maximum hardness of 47.1GPa was achieved as the Si content was 8.6at.%. In the mechanical and oxidation resistance measurements, the Ti–Si–N coatings showed three distinct behaviors. (i) The coatings with Si contents of no more than 8.6at.% performed good adhesion strength quality onto the HSS substrates. (ii) The fracture toughness of the coatings decreased with the increase in Si content. (iii) The Ti–Si–N coating with 8.6at.% Si showed the excellent oxidation resistance behavior. The cutting performance under using coolant conditions was also evaluated by a conventional drilling machine. The drills with Ti–Si–N coatings performed much better than the drills with TiN coating and the uncoated drills.
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