Influence of growth process of GaN HT buffer layer on InGaN/GaN MQWs

Lai Wang,Yi Luo,Hongtao Li,GuangYi Xi,Yang Jiang,Changzheng Sun,Zhibiao Hao,Yanjun Han
2006-01-01
Abstract:Bulk GaN and InGaN/GaN multiple quantum wells (MQWs) were grown on (0001) sapphire substrate by metal organic vapor phase epitaxy (MOVPE). By optimizing the growth process of the high temperature buffer layer, the surface root-mean-square roughness of bulk GaN and InGaN/GaN MQWs decreased obviously. Furthermore the temperature dependence of the photoluminescence spectra were measured to estimate the internal quantum efficiency (IQE) of InGaN/GaN MQWs. An 82% increase of IQE is obtained according to the Arrhenius model.
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