Optomechatronic Design of Integrated Systems for Microassembly of MEMS Sensors

Hui Xie,Weibin Rong,Jiatao Wang,Wei Chen

DOI: https://doi.org/10.1109/icma.2006.257722

2006-01-01

Abstract:Batch microassembly of MEMS sensors is limited by the manual manipulation required specially trained technicians. To reduce the production costs and simultaneously obtain high production quality, a microscopic vision based integrated system for automated anodic bonding is developed. Optomechatronic design is essential to the development of integrated systems due to the basic importance of microscope optics to microassembly. In this paper, major methodology issues in optomechatronic design of integrated systems are introduced. A wavelet-based microscopic focus measure and a control scheme with a modified Smith predicator to decrease the inherent time delay of vision system are presented to demonstrate the strength of using the unique properties of optomechatronics in microscopic vision servoing. A smart force sensor with one dimension is employed to sense and control the interactive force. To perform manipulations automatically, a control system, including a task planning level and a real-time execution level, is developed