The Interface Structure of InAs/GaInSb Strained-Layer Superlattice

QIU Yong-xin,LI Mei-cheng,ZHAO Lian-cheng
DOI: https://doi.org/10.3321/j.issn:1001-9731.2005.09.003
2005-01-01
Abstract:The type of interface structure and its effect on the interface structure and photoelectric properties of II InAs/GaInSb strained-layer superlattice have been introduced.And the atom replacement and diffusion at the interface have been analyzed.Meanwhile,by summarizing the processing of controlling MBE growth of InAs/GaInSb interface,we proposed that the migrationenhanced epitaxial(MEE) technique can effectively alleviate the degree of atom replacement and diffusion at the interface of the superlattices.
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