Abstract:ZnAlO thin films with different Al concentrations were prepared on glass and silicon substrates by Magnetron sputtering in this paper. Scanning electron microscopy (SEM), X-ray diffraction (XRD), spectrometer and other instruments were used to analyze the surface morphology, microstructure, transmittance and Raman spectrum of the films. The results showed that trace Al doping significantly increased the surface morphology and size of ZnAlO thin films; The low doped ZnAlO thin film exhibits a good preferred orientation. As the Al doping concentration increases, the main growth direction of the crystal gradually shifts from (101) to (103), and the grain size decreases with the increase of doping concentration during low doping; When the wavelength of ZnAlO film is less than 330 nm, the transmittance of the film is almost zero; When the wavelength is greater than 350 nm, the transmittance of the thin film decreases with the increase of Al doping concentration, and there is a blue shift trend with the increase of Al concentration. When the wavelength is between 420-900nm, the average transmittance of ZnAlO thin film can reach over 90%, and the transmission performance is good; The ZnAlO thin films all have structural characteristic peaks of wurtzite with a frequency of about 437 cm −1 , and the Raman peak position does not move with the increase of Al concentration.

Study on One-dimension Well-aligned ZnO Whiskers and Doping by MOCVD

Preparation of Well-Aligned ZnO Whiskers on Glass Substrate by Atmospheric MOCVD

A Study on the In-Situ Growth of Highly Oriented Zno Whisker

Effect of Al-doping on Crystallinity and Microstructure of ZnO:Al Thin Films

Microstructure and Electrical Properties of Al-doped ZnO Thin Films

On the formation of well-aligned ZnO nanowall networks by catalyst-free thermal evaporation method

Low-temperature Growth and Raman Scattering Study of Vertically Aligned ZnO Nanowires on Si Substrate

Alignment-controlled Hydrothermal Growth of Well-Aligned ZnO Nanorod Arrays

Preparation and Growth Mechanism of Well-aligned ZnO Nanowires by Chemical Vapor Deposition

Highly Conductive Al-doped Tetra-Needle-like ZnO Whiskers Prepared by a Solid State Method

Structure-directing self-organized, one-dimensional ZnO single-crystal whiskers

Well-aligned ZnO Nanowires Grown on Si Substrate Via Metal–organic Chemical Vapor Deposition

The structure and optical characters of the ZnO film grown on GaAs/Al2O3 substrate

Preparation and Growth Mechanism of ZnO Whisker

Preparation and Characterization of Monoclinic Rod-Shaped ZrO 2 Whiskers Via Sulfate Flux

Low-temperature Growth of ZnO Nanowire Array on Glass Substrate by Chemical Vapor Deposition

Microstructure and optical properties of ZnAlO films prepared by Magnetron sputtering

In situ doping of ZnO nanowires using aerosol-assisted chemical vapour deposition

Study on the preparation and the film-forming properties of Mo-and Al-doped ZnO ceramic targets

Growth mechanism and diameter control of well-aligned small-diameter ZnO nanowire arrays synthesized by a catalyst-free thermal evaporation method.

Preparation and characterization of Al-doped quasi-aligned ZnO submicro-rods