Abstract:Zinc oxide (ZnO) films with thicknesses from (9.1 +/- 0.7) to (145 +/- 7) nm were deposited on silicon substrates by ion-assisted electron beam evaporation (EBE), and transformed to a highly (110)-oriented non-polar phase through thermal treatment at temperatures of 300, 500, and 700 degrees C. The structural, morphological and optical properties of the ZnO thin films were systematically characterized using transmission electron microscopy (TEM), X-ray diffraction (XRD), atomic force microscopy (AFM), spectroscopic ellipsometry (SE), and photoluminescence (PL). The XRD and AFM results illustrate that the deposited ZnO films evolved from an X-ray amorphous structure to the polycrystalline hexagonal wurtzite structure with increasing thickness and experienced a crystallographic plane improvement from (102) to the (110) non-polar phase during annealing. The dielectric functions of the whole layer are mainly affected by the dielectric responses near the surface of ZnO nanocrystals and show an upward trend with nanocrystal growth, induced by thickness and annealing temperature. The optical band gaps were also investigated and correlated with the structural properties. In the PL spectra, a strong ultraviolet luminescence (UVL) band and a weak visible green luminescence (GL) band were observed. The intensity ratio of UVL and GL-associated with crystal quality-agrees with the results acquired from other measurements. The two determinants for highly (110)-oriented non-polar ZnO films are the suppression of growth in the (002) direction by ion bombardment and the promotion of the (110) plane induced by diffusion energy during annealing. (C) 2017 Elsevier B.V. All rights reserved.

A Study on the In-Situ Growth of Highly Oriented Zno Whisker

Preparation of Well-Aligned ZnO Whiskers on Glass Substrate by Atmospheric MOCVD

Preparation of ZrO 2 whiskers through high pressure and high temperature method

Preparation of Large-Scale Highly Oriented Zno Noodle Arrays and Study on the Photoconductivity

Study on One-dimension Well-aligned ZnO Whiskers and Doping by MOCVD

Preparation and Growth Mechanism of ZnO Whisker

Preparation and Characterization of Monoclinic Rod-Shaped ZrO 2 Whiskers Via Sulfate Flux

Growth of Hexagonal Zno Nanowires and Nanowhiskers

In-Situ Growth of ZnO Whiskers on Ti2ZnC MAX Phases

Structure-directing self-organized, one-dimensional ZnO single-crystal whiskers

Growth Mechanism Study Via in Situ Epitaxial Growth of High-Oriented Zno Nanowires

Growth and Formation Mechanism of C-Oriented ZnO Nanorod Arrays Deposited on Glass

Preparation and Growth Mechanism of Molybdenum Trioxide Whisker

Preparation and Growth Mechanism of Well-aligned ZnO Nanowires by Chemical Vapor Deposition

Inclined and ordered ZnO nanowire arrays developed on non-polar ZnO seed-layer films

Preparation of Zno Cluster and Rod-Like Whiskers Through Hydrothermal Methods

Structural and Optical Properties of Highly (110)-Oriented Non-Polar ZnO Evaporated Films on Si Substrates

Structure-Direct Assembly of Hexagonal Pencil-Like Zno Group Whiskers

A Novel Whisker of α-MoO 3 : Characterization and Growth Mechanism

Preparation and Dielectric Properties of Nanostructured ZnO Whiskers

Preferential growth of ZnO thin films by the atomic layer deposition technique