Monte Carlo Simulation on Low-Energy Electrons Scattering in Ni, NiTi and Ti Bulks

Hai-jun SHEN
DOI: https://doi.org/10.3969/j.issn.1005-2615.2005.06.005
2005-01-01
Abstract:Monte Carlo method is used to simulate energies and space distributions of low-energy electrons scattering(E_0≤5 keV) in Ni,NiTi and Ti bulks.The energy distributions of backscattering electrons(BSEs),depth and surface distributions of BSEs,absorbed elections(AEs) and the energy loss are analyzed.Results show that(1)with the decrease of the energy E_0of incidence electrons,depths of BSEs,AEs,and the energy loss in three bulks decrease,and their resolutions increase;(2)for the same E_0,depths of BSEs,AEs and the energy loss have the order of NiNiTiTi,resolutions have the contrary order of NiNiTiTi;(3)for the same E_0,depths of BSEs,AEs,and the energy loss for NiTi,as well as resolutions are approximate to the average ones of Ni and Ti,respectively.
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