Modification study of porous silica antireflective films

Qiaoying Jia,Ruijun Liu,Haiyuan Li,Yongxing Tang,Zhonghong Jiang
DOI: https://doi.org/10.3321/j.issn:1002-185x.2004.z1.022
2004-01-01
Rare Metal Materials and Engineering
Abstract:The effects of the prepolymer of methyltriethoxysilane (PMTES) on the stability of silica colloidal suspension containing polyethylene glycol (PEG), as well as on the stability, structure and morphology of derived films were investigated. The results showed that the variation of suspension viscosity took place but the stability retained when PMTES solution was introduced, and the storage limitation of the modified suspension was more than two months at room temperature. The obvious change of the structure of PMTES film occurred when the heat treatment temperature was over 200° C. The stability of the derived films was improved greatly with heat treatment of half an hour at 150° C, and its transmission almost unvaried after 5 months storage at the room temperature. The morphology of hybrid films varied only little, the film layer was dense, its surface was uniform, and its environment ability resistance was much increased.
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