High Precision Laser Deep-hole Diameter Measurement Based on Dynamic Abbe′s Principle

叶树亮,谭久彬
DOI: https://doi.org/10.3321/j.issn:1005-0086.2004.08.021
2004-01-01
Abstract:The ultra-precision measuring of deep-hole diameters is a tough task of inner size measurement. A method of laser deep-hole diameter measuring were presented based on dynamic Abbe's principle. The measurement system integrates the length measurement technique of dual frequency laser interfere and the aiming method of dual-direction capacitance displacement sensor. Through the suitable arrangement of capacitance displacement aiming sensor, length and depth measuring optical paths, it was ensured that any section hole-diameter's measurement of deep hole follows the Abbe's principle. Six standard gauges between φ 5 mm and φ16 mm were employed to test the characteristic of the system. The ultra-precision measurements of the deep-hole's any section hole diameters were experimentally realized by this system. The resolution is 10 nm and the uncertainty is 0.1 μm.
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