Design and Simulation of On-Line Test Structure for Thermal Conductivity of Polysilicon Thin Films

许高斌,黄庆安
DOI: https://doi.org/10.3969/j.issn.1674-4926.2004.04.014
2004-01-01
Abstract:An on-line test structure for measuring the thermal conductivity of polysilicon thin films is proposed. The measurement method and thermal modeling are given. The results are confirmed by ANSYSTM. The method can be used in the processing line because the vacuum testing circumstances are not required.
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