Studies on lithium phosphorous oxynitride electrolyte thin films and a new all-solid-state thin film lithium battery

Wenyuan Liu,Zhengwen Fu,Qizong Qin
2004-01-01
Acta Chimica Sinica
Abstract:Lithium phosphorous oxynitride (LiPON) electrolyte thin films have been fabricated by nitrogen plasma-assisted deposition coupled with electron-beam reactive evaporated Li3PO4 for the first time. This electrolyte thin film, deposited at the nitrogen plasma reactor power of 350 W, was found to be amorphous with the ionic conduction of 6.0 × 10 -7 S/cm at 300 K and an electrochemical stable window of 5.0 V. By using the LiPON thin film, a new all-solid-state thin film lithium battery of Li/LiPON/Ag0.5V2O5 has been successfully prepared. The cathode thin film of Ag0.5V2O5 was fabricated using pulsed laser deposition (PLD), and the metallic lithium anode thin film was prepared via vacuum thermal evaporation. For Li/LiPON/Ag0.5V2O5 battery, the open circuit voltage was 3.0 V and the first discharge capacity was 62 μAh·cm -2·μm-1 at a current density of 14 μA/cm 2. After the 10th cycle, the capacity fading was limited to about 0.2% per cycle and this battery could be cycled more than 550 cycles.
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