Study of Optical Properties and TEM of Nanoparticles in Ni + -Implanted Sapphire

Xiang X.,Zu X.T.,Zhu S.,Wang L.M.
DOI: https://doi.org/10.1557/proc-792-r9.9
2003-01-01
Abstract:64-keV Ni ion implantation was performed at room temperature up to a dose of 1 × 10 17 cm −2 in α -Al 2 O 3 single crystals. The charge states, structure and optical properties of metallic embedded Ni nanoparticles were studied by using X-ray photoelectron spectroscopy (XPS), transmission electron microscopy (TEM) and optical spectroscopy, respectively. XPS analysis showed that implanted Ni ions are mainly in charge state of metallic Ni 0 . Nanoparticles distributed from the surface to 30 nm below the surface were observed in a bright-field cross-sectional image. The size of nanoparticles ranges from 1 to 5 nm in diameter. A selected area electron diffraction (SAED) pattern shows Ni nanoparticles with lattice parameter a = 0.352 nm. A high-resolution electron microscopy (HREM) image indicated the Ni-implanted area had been entirely amorphized. A new broad absorption band centered at 400 nm appeared in the optical absorption spectrum of the as-implanted crystal, due to surface plasma resonance (SPR) of Ni nanoparticles.
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