Static Characteristics of AlGaN/GaN High Electron Mobility Transistors with Different Thickness of AlGaN Layer

Tong Wu,Zhibiao HAO,Guang Tang,Wenping GUO,Hui Hu,Changzheng Sun,Yi Luo
DOI: https://doi.org/10.3321/j.issn:0253-4177.2003.11.002
2003-01-01
Abstract:The growth and device fabrication of AlGaN/GaN high electron mobility transistors (HEMTs) are carried out by using metal-organic vapor phase epitaxy (MOVPE) system.Specially the performances of HEMT devices with different thickness of AlGaN layer are compared.The device with thinner spacer layer exhibits better static performance.And a maximum saturation current density of 650mA/mm and a peak extrinsic transconductance of 100mS/mm are obtained from the devices with gate length of 1μm.
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