Abstract:In this paper, a wafer-scale gold-to-gold thermo-compression bonding packaging based on an RF distributed MEMS transmission line (DMTL) phase shifter is proposed. The DMTL phase shifter, based on a coplanar waveguide (CPW), has symmetrical saw-shaped structures in the CPW signal line under the MEMS bridge and an insulation layer in the middle of the structures. Two Si wafers are bonded together using gold-to-gold thermo-compression bonding with one as the cap wafer and the other as the substrate wafer which embodies RF DMTL phase shifter. A CST software is used for the modeling, simulation and optimization from 30 to 40 GHz. Results show that the proposed design, with a 35 GHz central resonant frequency, has a return loss less than -10 dB within 2.4 GHz bandwidth range and for each RF MEMS switch-type bridge, as high as 60 degrees phase shift is realized. Compared with the naked MEMS phase shifters, the return loss can be improved by 3 dB, and the performance of phase shift remains almost the same.

Study of MEMS RF Switches Array Membrane--Millimeter Wave Phase Shifter

The Study of MEMS Millimeter Wave Phase Shifter

MEMS-based RF Phase Shifters

MEMS Phase Shifter with AlSi Alloy Membrane on High-Resistivity Silicon

A 3-port MEMS switch for MEMS phase shifter application

5-Bit Spiral Distributed RF MEMS Phase Shifter

A Quadruple-Anchored RF-MEMS Switch for Switched-Line Phase Shifters.

Design of MEMS millimeter-wave phase shifters

A Compact 5-bit Switched-line Digital MEMS Phase Shifter

High-Isolation Contact Switch in Mems Phase Shifter

Millimeter Wave Phase Shifters With Periodically Spaced Mems Bridges Loaded

A 4-Bit Switched-Line Phase Shifter Based on MEMS Switches

Research on the RF-MEMS switch with low elasticity coefficient in the X-band phase shifter

Notice of Violation of IEEE Publication PrinciplesKa-band Distributed MEMS Phase Shifters on Silicon Using AlSi Suspended Membrane

A Wafer-Scale Packaging for RF DMTL Phase Shifter

Study on low voltage actuated MEMS rf capacitive switches

Design and Simulation of RF MEMS Switch

The Study of Millimeter-wave MEMS Phase shifter feed network

A 1.7–2.7-GHz 4-bit Phase shifter based on packaged RF MEMS switches

Application of AlSi Alloy Membrane in MEMS Capacity Switch

A Novel Design Of Rf-Mems Phase Shifter Based On Bridge-Like Coplanar Waveguide