The Dynamic Behavior Of Tensile Stress Thin Films

Jh Zhu,Zy Zhou,Hg Ding,Xy Ye

2003-01-01

Abstract:Silicon thin films play an important role in MEMS devices. So it is important to characterize their dynamic behaviors. But because of the properties of the materials or the MEMS process they are treated with, most of the thin films have large tensile or compressive stress. The stress greatly changes the mechanical properties of the thin films. This paper studies the natural frequency and the vibration of tensile stress thin films under the squeeze film damping. The analytic form of the first order resonant frequency is deduced through the dynamic model of the thin plate with tensile stress. The results show that when the thickness of the plate decreases to some extent, the first order resonant frequency of the tensile stress plate is independent of the thickness and Young's modulus; it's only determined by its stress and length.