Optimizing Design of a Force Probe with Six-Degree of Freedom

Shengjun Hu,Tao Mei,Deyi Kong,Yan Zhang,Fei Sun
DOI: https://doi.org/10.1115/imece2003-41234
2003-01-01
Abstract:A six-degree freedom force probe with double-face structure was developed based on piezoresistive effect and MEMS process. The sensor was constructed by two bonded silicon wafers which have the same structure with prior probe. A rectangular through hole was designed in the middle of the two silicon wafers in order to improve the axial sensitivity while keeping structural stability. Stress distributions caused by different forces and moments were obtained according to theoretical analysis and FEA calculation. The arrangement of piezoresistors on both sides fully utilized the symmetrical feature, and the bridge circuits were designed to detect corresponding force signals. Finally, the sensitivities of the probe to six-axis forces were calculated.
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