Abstract:The quantitative characterization of soft tissue viscoelastic properties can aid in disease prognosis and diagnosis. Existing technologies present challenges to measuring localized in vivo tissue relaxation data while meeting load and geometric constraints. This research presents the design, prototype, and characterization of a micro-force sensor that could enable better access to confined spaces of the human body. The novel design of the uniaxial micro-force sensor has an external diameter of less than or equal to 3.5 mm and 1 N load capacity for transurethral palpation of the bladder interior wall. The conceptual design of the micro-force sensor and a finite element-based discrete optimization procedure to determine the optimum values of the identified design parameters of bend radius, bend angle, and thickness while meeting defined operational and geometric constraints are presented. These optimum values guided the prototyping of an aluminum sensing element with 2.18 mm bend radius, 104.9° bend angle, and 0.3 mm thickness. A miniature metal foil strain gauge was attached at defined location on the sensing element for measurement purposes. An experimental testbed was developed, calibrated, and used for characterization experiments. The performance matrix of the prototyped micro-force sensor was experimentally evaluated. The sensitivity, resolution, accuracy, precision, and repeatability band of the sensor were evaluated to be N, 2.6 mN, 28.6 mN, 87.22%, and ±2.87%, respectively, with a hysteresis of 118 mN. These experimental results provide confidence to further employ the sensor for in vivo experiments toward the identification of viscoelastic properties of soft tissue.

A Three-Axial Micro-Force Sensor Based on MEMS Technology

A Compliant Three-Axis Force Sensor with Solid–Liquid Hybrid Cover for Prosthetic Fingertip

Probe-Type Microforce Sensor for Mirco/Nano Experimental Mechanics

Design and Manufacture of a High Precision MEMS Flexible Force Sensor

Graphene piezoresistive flexible MEMS force sensor for bi-axial micromanipulation applications

Fabrication and Characterization of Monolithic Integrated Three-Axis Acceleration/Pressure/Magnetic Field Sensors

Flexible Capacitive Tactile Sensor Array with Truncated Pyramids As Dielectric Layer for Three-Axis Force Measurement

A novel cmos-mems tri-axial tactile force sensor using capacitive and piezoresistive sensing mechanisms

Fiber‐integrated Force Sensor using 3D Printed Spring‐Composed Fabry‐Perot Cavities with a High Precision Down to Tens of Piconewton

Development of a Compliant Magnetic 3-D Tactile Sensor with AMR Elements.

Three-dimensional microfabrication for a multi-degree-of-freedom capacitive force sensor using fibre-chip coupling

A piezoresistive-based 3-axial MEMS tactile sensor and integrated surgical forceps for gastrointestinal endoscopic minimally invasive surgery

Three-dimensional printed microcantilever with mechanical metamaterial for fiber-optic microforce sensing

Microstructured Cantilever Probe on Optical Fiber Tip for Microforce Sensor

A measuring method for micro force based on MEMS planar torsional spring

Towards a real-time 3D vision-based micro-force sensing probe

Investigation of Loading and Force Sensing Properties of a Probe-Type Microforce Sensor with Force-Distance Curves

High Sensitivity MEMS Strain Sensor: Design and Simulation

A Compliant 3-Axis Fiber-Optic Force Sensor for Biomechanical Measurement

Hybrid 3D printed three-axis force sensor aided by machine learning decoupling

Design, Prototyping, and Characterization of a Micro-Force Sensor Intended for Tissue Assessment in Confined Spaces