Six-axis Force/torque Sensor for Micro-Testing System for MEMS

Duanwei He
2003-01-01
Abstract:A new type of six axis force sensor which can be used in MEMS measurement platform has been designed and its performances has been verified. Major features of it are high level of intrinsic decoupling of the signals from the strain gauges which greatly simplified the design of the signal processing system and reduced cost, high resolutions in all six axis, high linearity and repeatability, structural symmetry, low cost, simple procedure of calibration and easy reproduction. The measurement principle of the sensor is described and the experimental results and transfer matrix are given.
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