A Simple Tool to Cut the Protruding Flange of Photoresist Formed in Spin Coating Process for Lithography Technology

YZ He,H Niu,JJ Qi,YG Zhao,BS Cao
DOI: https://doi.org/10.1063/1.1471350
IF: 1.6
2002-01-01
Review of Scientific Instruments
Abstract:A facile tool is suggested for cutting the protruding flange of photoresist (PR) along the edge of a small substrate surface, which is caused by the spin-coating process in lithography. When the dimension of the substrate reduces to a few millimeters, the edge problem of PR cannot be ignored. Since the PR's thickness along the edge of the sample is much larger than that in the middle, a traditional double exposure method does not work well. The cutter proposed here consists of a blade and a sample holder, which are installed in a base. By adjusting the blade at a suitable dip angle and pushing it to the flange of PR along the edge of substrate fixed by the sample holder, the flange of PR of small samples will be eliminated completely with great ease.
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