Ti metallization on AlN ceramics surface by molten salt reaction

Zhe Zhang,Wei Pan,Jianqiang Li
2002-01-01
Rare Metal Materials and Engineering
Abstract:Continuous and dense Ti thin film on AIN surface was prepared by molten salt reaction. X-ray diffractor was employed to investigate the influence of time and temperature and the initial K2TiF6 concentration on the film phase composition. The results showed that the fraction of Na2Ti3Cl8 decreased and TiN increased with the increase of time, temperature and initial K2TiF6 concentration. The reason of these phenomenons was discussed. The formation process of the thin film was also discussed.
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