Joining of Molten Salt Reaction Metallized Si3n4 to Si3n4

J Chen,W Pan,SY Zheng,Y Huang
DOI: https://doi.org/10.3321/j.issn:1000-324x.2000.03.022
IF: 1.292
2000-01-01
Journal of Inorganic Materials
Abstract:Based on the deposition of titanium films on Si3N4 surface by molten salt reactions, the wetting behavior of a liquid CuAg eutectic alloy on the titanium metallized Si3N4 was studied, it was found that, the metallized sample can be fully wetted by the eutectic alloy. Based on this result, the joining of metallized Si3N4 to Si3N4 was successfully obtained and the joining technique was systematically studied. TEM observation on the interfacial structure of the joints found that Ti-Cu-Si-N phases widely existed at the interface and their possible effects on the shear strength of the joints were also discussed.
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