Interfacial Structures and Reactions Between Metallized Titanium Coating and Si3n4 Substrates

J Chen,P Wei,QL Huang,Y Huang
DOI: https://doi.org/10.1016/s0167-577x(97)00227-9
IF: 3
1998-01-01
Materials Letters
Abstract:A new metallization method of Si3N4 ceramics has been developed. It is found that during the treatment process, the titanium coating reacted with Si3N4 substrate forming a multi-layer structure in the interface. Based on the thermodynamic calculations and other analysis, the possible reactions between titanium and Si3N4 are discussed.
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