Synthesis of TiO1+x bioceramics film by glow plasma oxidation method

Chuanlin Zheng,Zhiyong He,Zhong Xu,Fuzhai Cui
2002-01-01
Rare Metal Materials and Engineering
Abstract:Ti-O film or TiO1+x film is a kind of biocompatible bioceramics materials. A new method, glow discharge plasma oxidation, has been used in synthesizing the Ti-O film. In this paper. The effects of ion bombardment and process parameters on the structures of titanium oxide layers have been investigated. The results indicate that there exists a certain relationship. between the thickness of the oxidation layer and the oxygen partial pressure, temperature and time. Especially, in the condition of hollow cathode discharge, the ion bombardment enhances ionization of oxygen, promotes the oxygen permeation and facilitates the formation of the oxide of low valence states of titanium.
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