Research on a Novel Fiber-Optic Triangulation Sensor Used for Surface Precision Measurement

赵勇,刘丽华,李鹏生,浦昭邦
DOI: https://doi.org/10.3321/j.issn:0253-2239.2002.04.021
2002-01-01
Abstract:Based on the fiber-opitic sensor technology and triangulation method, a novel fiber-optic triangulation sensor was proposed for surface measurement. According to the spoke-like receiving fibers arrangement, the surface slope angle can be obtained as well as the displacement. The obtained slope information can be effectively used to improve the accuracy of the measured coordinate values impacted by slope angle of the measured surface. And measurement errors caused by ambient light fluctuation, intensity disturbance of the light source and reflectance variation can be effectively eliminated. The mathematical model was established. The theoretical analysis and the preliminary experimental results approve the effectivity and practicability of the system and the unstability of the system was better than 0.3%, the lateral and vertical resolutions can reach 8 μm and 0.1 μm, respectively.
What problem does this paper attempt to address?