Abstract:This paper discusses the pulse signal of a highly sensitive lateral deformable optical microelectromechanical systems (MEMS) displacement sensor based on Wood's anomalies and its corresponding tolerance. The optical reflection amplitude of the device changes with the displacement of the nanostructured grating elements. Unexpectedly, the device's original sinusoidal signal develops into a new signal form (i.e., a pulse signal), when the air gap between the two layers of gratings decreases. Since the slope of the pulse signal, namely 2.5%/nm (i.e., 0.65 dB/nm), is eight times higher than that of the original signal form, namely 0.3%/ nm (i.e., 0.03 dB/nm), the sensitivity of the structure improves by eight times. However, this device is very sensitive to parameters such as its wavelength, period, duty ratio, and air gap. In this paper we used rigorous coupled wavelength analysis (RCWA) to analyze and optimize the respective influence of each parameter on the device's performance. We have introduced two methods to search for the optimal setting and have demonstrated the optimal settings of different incident lights. The simulation results indicate that it is close to 85% possible to achieve an actual device with the highest slope superior to 0.5%/nm and it is 64% possible that the highest slope of an actual device falls in the interval ranging from 1.0%/nm to 2.0%/nm. All the simulated data helped us better understand the tolerance of the pulse signal and guide us toward the development of an actual device. (C) 2015 Optical Society of America

Optimizing Algorithm for Existing Fiber-Optic Displacement Sensor Performance

Research of a Reflective Fiber-Optic Displacement Sensor with Intensity Compensation

Highly Sensitive Lateral Deformable Optical MEMS Displacement Sensor: Anomalous Diffraction Studied by Rigorous Coupled-Wave Analysis.

Highly Sensitive Displacement Sensor Based on Composite Interference Established Within a Balloon-Shaped Bent Multimode Fiber Structure.

Subnanometer Resolution Displacement Sensor Based on a Grating Interferometric Cavity with Intensity Compensation and Phase Modulation

Design and Operation of a Transmissive Plastic Fiber Optical Displacement Sensor

High Precision Machining of a Displacement Sensor for Helicoidal Motions

A simple and high-resolution POF displacement sensor based on face-coupling method

A Novel Fiber Optic Displacement Sensor Based on Reflected Light Intensity

An ultracompact high-resolution displacement sensor based on self-interference effect of single optical nanograting

Analysis and Design of Fiber Microprobe Displacement Sensors Including Collimated Type and Convergent Type for Ultra-Precision Displacement Measurement

A Fiber-Based Chromatic Dispersion Probe for Simultaneous Measurement of Dual-Axis Absolute and Relative Displacement

A Fiber-Based Chromatic Dispersion Probe for Simultaneous Measurement of X-Axis and Z-Axis Displacements with Nanometric Resolutions

Nonlinearity-suppressed Micro-Probe Fiber Optic Interferometer for Accurate Long-Range Displacement Measurements

High-precision Microdisplacement Sensor Based on Zeroth-Order Diffraction Using a Single-Layer Optical Grating.

Study of Fiber Grating Displacement Sensor

Large-scale range diffraction grating displacement sensor based on polarization phase-shifting

High-precision micro-displacement optical-fiber sensor based on surface plasmon resonance.

A Novel Optical Fiber Displacement Measurement System

A Novel Micro-Displacement Sensor Based on Double Optical Fiber Probes Made through Photopolymer Materials

Hybrid optical fiber Fabry-Perot interferometer for nano-displacement sensing