Thickness dependence of PbZr0.52Ti0.48O3 thin film ferroelectric parameters
Xinjie Wang,Yi-Chi Wang,Biaolin Peng,Jianyu Deng,Ya Yang,Wenhong Sun,Zhonglin Wang
DOI: https://doi.org/10.1016/j.nanoen.2022.108161
IF: 17.6
2023-03-01
Nano Energy
Abstract:Thickness is an important parameter of ferroelectric thin films, which could have a strong influence on device performance based on them. In this paper, we demonstrate the mechanism of the thickness dependence of the ferroelectric performance of a Pb(Zr0.52Ti0.48)O3 (PZT52/48) film prepared with a sol-gel method. It is observed that the spontaneous polarization (P s ) is enhanced, while the dielectric permittivity (ɛ), the coercivity field (E c ), residual polarization (P r ), efficiency (η) and energy density (W energy ) are reduced with thicker film. In the meantime, the positive electrocaloric (EC) effect gradually transits into a negative regime. Changes in electrical properties are attributed to the increase in the tetragonal phase and the decrease in rhombohedral phase structure, due to the variation of in-plane tensile stresses with thickness which is confirmed by the atomic image of high-resolution transmission Electron microscopy. These findings provide guidance for study in modern high performance ferro-electronic device and material.
materials science, multidisciplinary,chemistry, physical,physics, applied,nanoscience & nanotechnology