Initial Growth of Thin Films with Low Nucleus Density and Linear Lateral Growth Rate on A Substrate Surface

QY Shao,RC Fang,KG Zhu,YA Liao,ZQ Xue
DOI: https://doi.org/10.1088/0256-307x/18/8/347
2001-01-01
Abstract:Based on corrected rate equations, the kinetics is revealed for the initial growth of thin films with a low nucleus density and a linear lateral growth rate on a substrate surface. In this case, the mobility and coalescence terms in the rate equations are neglected, and the coverage term takes a dominant role. All the calculated results are in agreement with experimental data. These results introduce a new scaling in the case of dominant coverage, which is different from the those in the case of coalescence or mobility in a dominant role.
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