Convective Mass Transfer Effect on Short-Time Liquid Phase Epitaxial Growth

LJ Chen,LC Chen,CC Wan,CS Lien
DOI: https://doi.org/10.1016/0923-0467(95)03052-2
1996-01-01
Abstract:The effect of slider velocity on the growth rate and epilayer thickness in liquid phase epitaxial (LPE) growth has been studied numerically by means of the boundary layer theory. The governing equations and boundary conditions under the boundary layer approximation have been developed and the melt velocity profile and growth rate have been solved by means of a similarity method and finite difference scheme. The simulation shows that two growth mechanisms occur during the LPE process. In the initial period of epitaxial growth the slider motion induces a disturbance in the melt; convective mass transfer predominates and the epilayer grows rapidly. After the melt has settled down, the mass transfer rate is controlled by diffusion and a concentration gradient is established to maintain the diffusion. Since the Sakiadis flow dominates the fluid motion in the sliding process and the boundary layer is fully developed at a position far from the leading edge, the epilayer thickness is uniform. In the initial growth period the velocity profile near the growth interface decreases drastically, resulting in a very short convective mass transfer region in the entire LPE growth.
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