Patterning of Sp(3)- and Sp(2)-Bonded Carbon by Atomic-Force Microscopy

JP Zhao,ZY Chen,YH Yu,X Wang,TS Shi,SP Wong,IH Wilson,T Yano
DOI: https://doi.org/10.1063/1.1354654
IF: 2.877
2001-01-01
Journal of Applied Physics
Abstract:We report the pattering of sp3- and sp2-bonded carbon by using conducting atomic-force microscopy (AFM) working in the noncontact mode. A ta-C film with ∼80% sp3 bonds was scanned by the conducting AFM with a biased tip. A current image that clearly shows gray/white and black features was obtained while scanning in the noncontact mode. These features were proposed to be the result of the different electron emission abilities of the sp3- and sp2-bonded carbon in the film. The result not only enables us to image the distribution of the sp3 and sp2 bonds of a-C, but also extends the AFM to provide the electron emission information of a-C on a nanometer scale.
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