Scanning Tunnelling Microscopy and Atomic Force Microscopy of Carbondiamond Films

ME WELLAND,AW MCKINNON,S OSHEA,GAJ AMARATUNGA

DOI: https://doi.org/10.1016/0925-9635(92)90158-k

IF: 3.806

1992-01-01

Diamond and Related Materials

Abstract:We have used both scanning tunnelling microscopy (STM) and atomic force microscopy (AFM) to image and measure electrical properties of diamond films.

What problem does this paper attempt to address?

Molecular Dynamics Simulation of Form Measurement Process of Soft Materials Using Atomic Force Microscope

Yindi Cai,Yuan-Liu Chen,Yuki Shimizu,So Ito,Wei Gao

DOI: https://doi.org/10.1109/nems.2016.7758221

2016-01-01

Abstract:Molecular dynamics simulations of contact mode form measurement process on a soft substrate with a special surface profile using a diamond AFM tip are preformed to investigate the contact behavior and the surface profile damages or distortions of the measured substrate. The process of contact mode imaging of the AFM can be treated as the process of nano-scratching. The simulation-predicted interaction force, including scratching force and normal force, characterizes the saw-tooth pattern, which is referred to as atomic stick-slips. The shape of measured substrate surface, especially the surface underneath the AFM tip, is distorted by the interaction force between the AFM tip and the substrate surface.
A wide-range metrology AFM and its applications

XiaoFeng Lin,Haijun Zhang,Dongxian Zhang

DOI: https://doi.org/10.1117/12.576240

2005-01-01

Abstract:In view of the fact that the application field of a dual tunneling-unit scanning tunneling microscope (DTU-STM) was strongly limited by sample conductivity, a dual imaging unit atomic force microscope (DIU-AFM) was developed for wide-range nano-metrology. A periodic grating is employed as a reference sample. The DIU-AFM simultaneously scans the grating and a test sample by using one single XY scanner. Their images thus have the same lateral size, and the length of the test sample image can be precisely measured by counting the number of periodic features of the reference grating. We further developed a new method of implementing wide-range nano-metrology. By alternatively moving the XY scanner in the X direction using a step motor, a series of pairs of images are obtained and can be spliced into two wide-range reference and test ones, respectively. Again, the two spliced images are of the same size, and the length of test image can be measured based on the reference grating features. In this way, wide-range metrology with nanometer order accuracy is successfully realized.
Scanning tunneling microscopy-based on-machine measurement for diamond fly cutting of micro-structured surfaces

wule zhu,shunyao yang,bingfeng ju,jiacheng jiang,anyu sun

DOI: https://doi.org/10.1016/j.precisioneng.2015.08.011

IF: 3.315

2016-01-01

Precision Engineering

Abstract:•The STM-based on-machine measurement system was newly developed on the diamond machine, with extended scanning range and nanoscale resolution.•It is capable of scanning difficult-to-measure surfaces with slopes of 45° and size of tens of micrometers.•It provides an efficient on-machine measurement during the fly cutting process to characterize the machined surface form.•Through the feedback of on-machine measured results, the fly cutting micro-structured surface form was significantly improved.
Scanning Tunneling Microscopy-Based in Situ Measurement of Fast Tool Servo-Assisted Diamond Turning Micro-Structures

Bing-Feng Ju,Wu-Le Zhu,Shunyao Yang,Keji Yang

DOI: https://doi.org/10.1088/0957-0233/25/5/055004

IF: 2.398

2014-01-01

Measurement Science and Technology

Abstract:We propose a new in situ measurement system based on scanning tunneling microscopy (STM) to realize spiral scanning of a micro-structure without removing it after fast tool servo (FTS) cutting. To avoid distortion of the machined and measured surface, the center alignment of the FTS tool and the STM tip was first implemented by an STM in situ raster scan of two circular grooves cut by the machine tool. To originally observe the machined surface, the trace of the STM tip is put in accord with that of the FTS by setting the same start and end points of cutting and scanning and the same feed rate, and both are triggered by the subdivided rotary encoder of the spindle of the diamond turning machine. The profile data of the in situ spiral scanning of the machined micro-lens array can be fed back to compensate the depth of the cut to guarantee sub-micron form accuracy after second machining. The efficient spiral scanning, proper matching and accurate evaluation results demonstrate that the proposed STM in situ measurement approach is of great significance to the fabrication process.
Microwave Atomic Force Microscopy Imaging for Nanometer-Scale Electrical Property Characterization.

Lan Zhang,Yang Ju,Atsushi Hosoi,Akifumi Fujimoto

DOI: https://doi.org/10.1063/1.3525058

2010-01-01

Abstract:We introduce a new type of microscopy which is capable of investigating surface topography and electrical property of conductive and dielectric materials simultaneously on a nanometer scale. The microwave atomic force microscopy is a combination of the principles of the scanning probe microscope and the microwave-measurement technique. As a result, under the noncontact AFM working conditions, we successfully generated a microwave image of a 200-nm Au film coating on a glass wafer substrate with a spatial resolution of 120 nm and a measured voltage difference of 19.2 mV between the two materials.
Scanning Tunneling Microscopy and Atomic Force Microscopy Studies of Biomaterials at a Liquid–solid Interface

SM LINDSAY,YL LYUBCHENKO,NJ TAO,YQ LI,PI ODEN,JA DEROSE,J PAN

DOI: https://doi.org/10.1116/1.578309

1993-01-01

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Abstract:We have compared the scanning tunneling microscopy (STM) and atomic force microscopy (AFM) using a clean gold surface under electrochemical potential control, finding that the STM usually yields higher resolution, although this may be a consequence of better production methods for STM tips. New methods for tethering DNA molecules to substrates have yielded many excellent AFM images of DNA, even under water. The highest resolution has been obtained with specially sharpened tips, but recent work suggests that this may not be necessary. Control of contamination, and tip–sample interactions (i.e., adhesion) are also important factors. We describe a scheme of magnetic control of AFM cantilevers which should overcome the mechanical instability that places a lower limit on contact force. This should permit active control of interaction forces with the instrument operated in water. We illustrate local force measurements made under water with examples of the measurements of the microelastic properties of bone and of the electrostatic interactions between pairs of colloidal particles. The STM has been used to image small DNA oligomers on a gold electrode in water at high resolution. STM images of DNA bases show that the purines form stacked aggregates with the same base-stacked structure as found in DNA. There is evidence of a connection between the macroscopically measured electrochemical properties of thymine and its STM contrast. Such electronic sensitivity might be useful for chemical identification of molecules.
Dual Tunneling Unit Scanning Tunneling Microscope for Nano-Metrology

Zhang Dong-xian,Feng Huang

2000-01-01

Abstract:A dual tunneling unit scanning tunneling microscopc(DTU-STM) is developed for nano-metrology.This article describes the measurement concept and the instrument of the DTU-STM.The crystalline lattice images were scanned by the DTU-STM to check the feasibility of nano-metrology.One metrological result of test sample image was provided.
Scanning Tunneling Microscopy-Basedin Situmeasurement of Fast Tool Servo-Assisted Diamond Turning Micro-Structures

Bing‐Feng Ju,Wu-Le Zhu,Shunyao Yang,Yang Ke-ji

DOI: https://doi.org/10.1088/0957-0233/25/5/055004

2014-01-01

Abstract:We propose a new in situ measurement system based on scanning tunneling microscopy (STM) to realize spiral scanning of a micro-structure without removing it after fast tool servo (FTS) cutting. To avoid distortion of the machined and measured surface, the center alignment of the FTS tool and the STM tip was first implemented by an STM in situ raster scan of two circular grooves cut by the machine tool. To originally observe the machined surface, the trace of the STM tip is put in accord with that of the FTS by setting the same start and end points of cutting and scanning and the same feed rate, and both are triggered by the subdivided rotary encoder of the spindle of the diamond turning machine. The profile data of the in situ spiral scanning of the machined micro-lens array can be fed back to compensate the depth of the cut to guarantee sub-micron form accuracy after second machining. The efficient spiral scanning, proper matching and accurate evaluation results demonstrate that the proposed STM in situ measurement approach is of great significance to the fabrication process.
Optical and Electronic-Properties of Amorphous Diamond

VS VEERASAMY,GAJ AMARATUNGA,WI MILNE,P HEWITT,PJ FALLON,DR MCKENZIE,CA DAVIS

DOI: https://doi.org/10.1016/0925-9635(93)90223-o

IF: 3.806

1993-01-01

Diamond and Related Materials

Abstract:The optical and electronic properties of highly tetrahedral amorphous diamond-like carbon (amorphous diamond, a-D) films were investigated. The structure of the films grown on silicon and glass substrates, under similar deposition conditions using a compact filtered cathodic vacuum arc system, are compared using electron energy loss spectroscopy (EELS). Results from hydrogenation of the films are also reported. The hydrogenated films show two prominent IR absorption peaks centred at 2920 and 2840 cm−1, which are assigned to the stretch mode of the CH bond in the sp3 configuration on the CH3 and CH sites respectively. The high loss EELS spectra show no reduction in the high sp3 content in the hydrogenated films. UV and visible transmission spectra of a-D thin films are also presented. The optical band gap of 2.0–2.2 eV for the a-D films is found to be consistent with the electronic bandgap. The relationship between the intrinsic compressive stress in the films and the refractive index is also presented. The space charge limited current flow is analysed and coupled with the optical absorption data to give an estimate of 1018 cm−3 eV−1 for the valence band edge density of states.
Imaging Thin Films of Organic Molecules with the Scanning Tunnelling Microscope

Richard E. Palmer,Quanmin Guo

DOI: https://doi.org/10.1039/b202462d

2002-01-01

Abstract:This article gives a topical review of the application of the scanning tunnelling microscope (STM) to the characterisation of thin films (typically monolayers) of organic molecules on surfaces. Three classes of molecules are considered: “self-assembled” thiol monolayers, macrocycles, e.g. porphyrins and cyclophanes, and passivated nanoparticles. Typically these molecules are deposited onto the surface of, e.g. gold/graphite, from a solution. The STM is shown to be a tool not just for imaging, from the morphology of the film down to the level of individual molecules, but also for molecular manipulation and for electrical measurements. Indeed, an appropriate understanding of the electrical characteristics of the STM measurement is essential for successful imaging of organic (or biological) molecules.
Microwave Atomic Force Microscopy: Quantitative Measurement and Characterization of Electrical Properties on the Nanometer Scale

Lan Zhang,Yang Ju,Atsushi Hosoi,Akifumi Fujimoto

DOI: https://doi.org/10.1143/apex.5.016602

IF: 2.819

2011-01-01

Applied Physics Express

Abstract:In this paper, we report a noncontact and quantitative method of evaluating and characterizing electrical properties with a nanometer-scale spatial resolution. Microwave atomic force microscopy (M-AFM) can be used to obtain the topography and microwave image of materials in one scanning process simultaneously. Under the frequency modulation (FM) AFM mode, we successfully applied M-AFM to create a microwave image of a Au nanowire with a spatial resolution of 170 nm. Moreover, based on the analytical and explicit expressions proposed, M-AFM can implement the quantitative evaluation and characterization of the local conductivity of materials on the nanometer scale. (C) 2012 The Japan Society of Applied Physics
Study of Single Molecules and Their Assemblies by Scanning Tunneling Microscopy

J. G. Hou,Kedong Wang

DOI: https://doi.org/10.1351/pac200678050905

2006-01-01

Pure and Applied Chemistry

Abstract:The recent rapid advances in nanotechnology, especially those based on molecules, are due in large part to our newly acquired abilities to measure and manipulate individual molecules and their assemblies. Among all the approaches for the study of single molecules, scanning tunneling microscopy (STM) is unique and powerful owing to its ability to accurately probe and control single molecules. High-resolution spatial imaging combined with scanning tunneling spectroscopy (STS) helps scientists investigate and resolve many chemical and physical problems at the molecular level. In this paper, we review our recent studies of single molecules and their assemblies by combining STM experiments and theoretical simulations based on the density functional theory (DFT).
Using AFM to measure the elastic modulus of Diamond-Like Carbon thin films

Robinson Franco Alvarez,Maria Cecília Barbosa da Silveira Salvadori

DOI: https://doi.org/10.1016/j.diamond.2024.111026

IF: 3.806

2024-04-06

Diamond and Related Materials

Abstract:In contemporary technological landscapes, a multitude of applications necessitate the fabrication of structures and mechanisms at exceptionally diminutive scales, prominently within the realm of Nano and Micro-Electro-Mechanical Systems (NEMS and MEMS). The comprehension of mechanical properties inherent in materials tailored for deployment in these applications assumes paramount significance. Consequently, an array of methodologies has been devised with the explicit purpose of delineating material properties at nano or micrometric scales. This report delves into select scholarly contributions aligned with this objective, and specifically, it explores a technique leveraging the capabilities of Atomic Force Microscopy (AFM) for the precise determination of the elastic modulus of Diamond-Like Carbon (DLC) films. The exploration of such methodologies is indispensable for advancing the understanding of material behavior at minute scales and facilitating the development of innovative technologies with enhanced structural integrity and performance characteristics.

materials science, multidisciplinary,physics, applied, condensed matter, coatings & films
Long Range And Accurate Measurement Of Deep Trench Microstructures By A Specialized Scanning Tunneling Microscope

Bing-Feng Ju,Yuan-Liu Chen,Wei Zhang,Wule Zhu,Chao Jin,F Z Fang

DOI: https://doi.org/10.1063/1.4721273

IF: 1.6

2012-01-01

Review of Scientific Instruments

Abstract:A compact but practical scanning tunneling microscope (STM) with high aspect ratio and high depth capability has been specially developed. Long range scanning mechanism with tilt-adjustment stage is adopted for the purpose of adjusting the probe-sample relative angle to compensate the non-parallel effects. A periodical trench microstructure with a pitch of 10 mu m has been successfully imaged with a long scanning range up to 2.0 mm. More innovatively, a deep trench with depth and step height of 23.0 mu m has also been successfully measured, and slope angle of the sidewall can approximately achieve 67 degrees. The probe can continuously climb the high step and exploring the trench bottom without tip crashing. The new STM could perform long range measurement for the deep trench and high step surfaces without image distortion. It enables accurate measurement and quality control of periodical trench microstructures. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4721273]
In Situ Nanoindentation Mechanical Property of Films by Atomic Force Microscope

Du Yuanming,Zhang Yuefei,Zhang Changhui,Liu Yanping

2015-01-01

Rare Metal Materials and Engineering

Abstract:An in situ nanoindentation test system was established by combining atomic force microscope (AFM) and scan electron microscope (SEM). This system enabled the indentation experiment using the AFM cantilever with Cube corner diamond indenter, and acquired the curve of load versus displacement. The experimental process can be observed in real time by in situ SEM simultaneously. A mechanical property testing method, based on the AFM cantilever loading curve and the in situ SEM indentation of images analysis, was well developed. The hardness and elastic model of the plastic thin film were obtained by measuring the maximum loading during the indentation and the residual area of the indentation by measuring SEM image. This method was demonstrated by conducting the indentation experiment on the sliver film deposited on the Si substrate using magnetron sputtering. Furthermore, the experiment conducted by the Nanoindenter G200 was presented here for comparison. The results show that the in situ AFM indentation possesses higher resolution of loading and displacement, and can achieve the indentation experiment scaled from nN to mN of the applied load. The hardness of the plastic thin film can be obtained by measuring the residual area of indentation. The pile-up effect of the soft film deposited on the hard substrate, which exists in the Oliver-pharr method, can be reduced by SEM image analyses of residual area and the calculation has a higher testing accuracy and reliability as well.
An Afm-Based Edge Profile Measuring Instrument for Diamond Cutting Tools

Takemi Asai,Takenori Motoki,Wei Gao,Bing-Feng Ju,Satoshi Kiyono

IF: 2.0411

2007-01-01

International Journal of Precision Engineering and Manufacturing

Abstract:This paper describes an atomic force microscope (AFM)-based instrument for measuring the nanoscale cutting edge profiles of diamond cutting tools. The instrument consists of a combined AFM unit and an optical sensor to align the AFM tip with the top of the diamond cutting tool edge over a submicron range. In the optical sensor, a laser beam is emitted from a laser diode along the Y-axis and focused to a small beam spot with a diameter of approximately 10 pin at the beam waist, which is then received by a photodiode. The top of the tool edge is first brought into the center of the beam waist by adjusting it in the X-Z-plane while monitoring the variation in the photodiode output. The cutting tool is then withdrawn and its top edge position at the beam center is recorded. The AFM tip can also be positioned at the beam center in a similar manner to align it with the top of the cutting edge. To reduce electronic noise interference on the photodiode output and thereby enhance the alignment accuracy, a technique is applied that can modulate the photodiode output to an AC signal by driving the laser diode with a sinusoidal current. Alignment experiments and edge profile measurements of a diamond cutting tool were carried out to verify the performance of the proposed system.
Scanning probe microscopy of biological samples and other surfaces

O Marti,V Elings,M Haugan,C E Bracker,J Schneir,B Drake,S A Gould,J Gurley,L Hellemans,K Shaw

DOI: https://doi.org/10.1111/j.1365-2818.1988.tb01452.x

Abstract:Scanning probe microscopes derived from the scanning tunnelling microscope (STM) offer new ways to examine surfaces of biological samples and technologically important materials. The surfaces of conductive and semiconductive samples can readily be imaged with the STM. Unfortunately, most surfaces are not conductive. Three alternative approaches were used in our laboratory to image such surfaces. 1. Crystals of an amino acid were imaged with the atomic force microscope (AFM) to molecular resolution with a force of order 10(-8) N. However, it appears that for most biological systems to be imaged, the atomic force microscope should be able to operate at forces at least one and perhaps several orders of magnitude smaller. The substitution of optical detection of the cantilever bending for the measurement by electron tunnelling improved the reliability of the instrument considerably. 2. Conductive replicas of non-conductive surfaces enabled the imaging of biological surfaces with an STM with a lateral resolution comparable to that of the transmission electron microscope. Unlike the transmission electron microscope, the STM also measures the heights of the features. 3. The scanning ion conductance microscope scans a micropipette with an opening diameter of 0.04-0.1 micron at constant ionic conductance over a surface covered with a conducting solution (e.g., the surface of plant leaves in saline solution).
A review of atomic force microscopy imaging systems: application to molecular metrology and biological sciences

Nader Jalili,Karthik Laxminarayana

DOI: https://doi.org/10.1016/j.mechatronics.2004.04.005

IF: 3.379

2004-10-01

Mechatronics

Abstract:The atomic force microscope (AFM) system has evolved into a useful tool for direct measurements of micro-structural parameters and unraveling the intermolecular forces at nanoscale level with atomic-resolution characterization. Typically, these micro-cantilever systems are operated in three open-loop modes; non-contact mode, contact mode, and tapping mode. In order to probe electric, magnetic, and/or atomic forces of a selected sample, the non-contact mode is utilized by moving the cantilever slightly away from the sample surface and oscillating the cantilever at or near its natural resonance frequency. Alternatively, the contact mode acquires sample attributes by monitoring interaction forces while the cantilever tip remains in contact with the target sample. The tapping mode of operation combines qualities of both the contact and non-contact modes by gleaning sample data and oscillating the cantilever tip at or near its natural resonance frequency while allowing the cantilever tip to impact the target sample for a minimal amount of time. Recent research on AFM systems has focused on many manufacturing and metrology processes at molecular levels due to its tremendous surface microscopic capabilities. This paper provides a review of such recent developments in AFM imaging system with emphasis on operational modes, micro-cantilever dynamic modeling and control. Due to the important contributions of AFM systems to metrology and biological sciences, this study also provides a comprehensive review of recent applications of different AFM systems in these two important areas.

robotics,automation & control systems,engineering, electrical & electronic, mechanical
Direct observation of native DNA structures with the scanning tunneling microscope.

W. Siekhaus,Rod Balhorn,T. P. Beebe,Troy E. Wilson,D. Ogletree,Miquel B. Salmeron,Joseph E. Katz

DOI: https://doi.org/10.1126/SCIENCE.2911747

IF: 56.9

1989-01-20

Science

Abstract:Uncoated double-stranded DNA dissolved in a salt solution was deposited on graphite and imaged in air with the scanning tunneling microscope (STM). The resolution was such that the major and minor grooves could be distinguished. The pitch of the helix varied between 27 and 63 angstroms in the images obtained. Thus the STM can be useful for structural studies of a variety of uncoated and isolated biomolecules.

Chemistry,Biology,Physics,Materials Science,Medicine
Electrical tomography using atomic force microscopy and its application towards carbon nanotube-based interconnects

A Schulze,T Hantschel,A Dathe,P Eyben,X Ke,W Vandervorst

DOI: https://doi.org/10.1088/0957-4484/23/30/305707

IF: 3.5

2012-07-11

Nanotechnology

Abstract:The fabrication and integration of low-resistance carbon nanotubes (CNTs) for interconnects in future integrated circuits requires characterization techniques providing structural and electrical information at the nanometer scale. In this paper we present a slice-and-view approach based on electrical atomic force microscopy. Material removal achieved by successive scanning using doped ultra-sharp full-diamond probes, manufactured in-house, enables us to acquire two-dimensional (2D) resistance maps originating from different depths (equivalently different CNT lengths) on CNT-based interconnects. Stacking and interpolating these 2D resistance maps results in a three-dimensional (3D) representation (tomogram). This allows insight from a structural (e.g. size, density, distribution, straightness) and electrical point of view simultaneously. By extracting the resistance evolution over the length of an individual CNT we derive quantitative information about the resistivity and the contact resistance between the CNT and bottom electrode.

materials science, multidisciplinary,physics, applied,nanoscience & nanotechnology

Scanning Tunnelling Microscopy and Atomic Force Microscopy of Carbondiamond Films

Molecular Dynamics Simulation of Form Measurement Process of Soft Materials Using Atomic Force Microscope

A wide-range metrology AFM and its applications

Scanning tunneling microscopy-based on-machine measurement for diamond fly cutting of micro-structured surfaces

Scanning Tunneling Microscopy-Based in Situ Measurement of Fast Tool Servo-Assisted Diamond Turning Micro-Structures

Microwave Atomic Force Microscopy Imaging for Nanometer-Scale Electrical Property Characterization.

Scanning Tunneling Microscopy and Atomic Force Microscopy Studies of Biomaterials at a Liquid–solid Interface

Dual Tunneling Unit Scanning Tunneling Microscope for Nano-Metrology

Scanning Tunneling Microscopy-Basedin Situmeasurement of Fast Tool Servo-Assisted Diamond Turning Micro-Structures

Optical and Electronic-Properties of Amorphous Diamond

Imaging Thin Films of Organic Molecules with the Scanning Tunnelling Microscope

Microwave Atomic Force Microscopy: Quantitative Measurement and Characterization of Electrical Properties on the Nanometer Scale

Study of Single Molecules and Their Assemblies by Scanning Tunneling Microscopy

Using AFM to measure the elastic modulus of Diamond-Like Carbon thin films

Long Range And Accurate Measurement Of Deep Trench Microstructures By A Specialized Scanning Tunneling Microscope

In Situ Nanoindentation Mechanical Property of Films by Atomic Force Microscope

An Afm-Based Edge Profile Measuring Instrument for Diamond Cutting Tools

Scanning probe microscopy of biological samples and other surfaces

A review of atomic force microscopy imaging systems: application to molecular metrology and biological sciences

Direct observation of native DNA structures with the scanning tunneling microscope.

Electrical tomography using atomic force microscopy and its application towards carbon nanotube-based interconnects