Study on a Novel Gas Sensor

谢丹,蒋亚东,姜健壮,吴志明,李言荣,潘伟
DOI: https://doi.org/10.3321/j.issn:0372-2112.2001.08.020
2001-01-01
Abstract:A new kind of sandwich-like Praseodymium bis[2,3,9,10,16,17,23,24-octakis(oct yl oxy)phthalocyaninato] complex Pr(Pc *)~{*-~}2(Pc *=Pc(OC~{*-~}8H~{*-*)~}17~{**~})~{*-~}8;R=OC~{*-~}8H ~{*-*)~}17~{**~})is used as film-forming material.Mixed ultrathin films of 1:3 Pr(Pc * )~{*-~}2:octadecanol(OA) have been fabricated using Langmuir-Blodgett (LB) techniqu e.A new gas-sensing device--LB-OS chemFET has been designed on which the Pr( Pc *)~{*-~}2/OA mixed LB film is deposited replacing the gate metal of conventional M OSFET.The sensitive property of Pr(Pc *)~{*-~}2/OA mixed LB film to nitrogen dioxid e (NO~{*-~}2) gas is studied by the change of drain current(~{*+~}I~{*-*)~}DS~{***+~}) during ga s exposure .The chemFET consisting of Pr(Pc *)~{*-~}2/OA mixed LB film can detect NO~{*-~}2 gas do wn to 5ppm.The qualities are attributed to the amplification by the FET and the ordered nature of LB film.The mechanism of sensitivity of Pr(Pc *)~{*-~}2/OA mixed LB film to NO~{*-~}2 is also studied in the paper.
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