Composite Material for Forming Micro-Structural Elements
L Pang,YB Yan,HT Liu,GF Jin
DOI: https://doi.org/10.1117/12.402774
2000-01-01
Abstract:Composite recording material was synthesized by hydrolysis and polycondensation of tetraethoxyorthosilicate and silane with photoinitiator added. With infrared spectral, the mechanism of response to light of the material was investigated. Vibrational spectroscopy is used to provide insight into the structure changes that occur when films are exposed with UV light. The decrease of absorption intensity in nu (C=O) 1698cm(-l) and nu (C=C) 1636cm(-1) bands reveal the polymerization in material after irradiation. Comparative experiments between two systems with mixed initiation and sole initiation are exported. UV spectra show that the transmittance of the sol-gel thin films drops down in a wavelength range of UV with addition of photoinitiator and irradiation. Developed in dilute base solution, microoptical elements, such as gratings, were fabricated by contact copy with UV-exposure.
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